JPS6183031U - - Google Patents
Info
- Publication number
- JPS6183031U JPS6183031U JP16964184U JP16964184U JPS6183031U JP S6183031 U JPS6183031 U JP S6183031U JP 16964184 U JP16964184 U JP 16964184U JP 16964184 U JP16964184 U JP 16964184U JP S6183031 U JPS6183031 U JP S6183031U
- Authority
- JP
- Japan
- Prior art keywords
- incident
- ion beam
- rotation mechanism
- substrate holder
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 238000010884 ion-beam technique Methods 0.000 claims description 3
- 238000000992 sputter etching Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Landscapes
- Magnetic Heads (AREA)
- Particle Accelerators (AREA)
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16964184U JPS6183031U (en]) | 1984-11-07 | 1984-11-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16964184U JPS6183031U (en]) | 1984-11-07 | 1984-11-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6183031U true JPS6183031U (en]) | 1986-06-02 |
Family
ID=30727359
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16964184U Pending JPS6183031U (en]) | 1984-11-07 | 1984-11-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6183031U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0336285A (ja) * | 1989-07-01 | 1991-02-15 | Hitachi Nakaseiki Ltd | イオンミリング方法及び装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5750436A (en) * | 1980-09-12 | 1982-03-24 | Fujitsu Ltd | Manufacture of semiconductor device |
| JPS58123711A (ja) * | 1982-01-19 | 1983-07-23 | Hitachi Ltd | 磁気バブルメモリ素子の製造方法 |
-
1984
- 1984-11-07 JP JP16964184U patent/JPS6183031U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5750436A (en) * | 1980-09-12 | 1982-03-24 | Fujitsu Ltd | Manufacture of semiconductor device |
| JPS58123711A (ja) * | 1982-01-19 | 1983-07-23 | Hitachi Ltd | 磁気バブルメモリ素子の製造方法 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0336285A (ja) * | 1989-07-01 | 1991-02-15 | Hitachi Nakaseiki Ltd | イオンミリング方法及び装置 |